GB/T 4298-1984
Abolished
T/TMAC 335-2026
Active
Group standards
T/TMAC 335-2026 Test Method for the Extreme Environmental Compatibility and Long-Term Reliability of Electrostatic Chucks Used in Ion Implantation Equipment
T/TMAC 335-2026
Price:
$ 20.00
Basic Information
Standard Code:
T/TMAC 335-2026
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Medical electronic instruments and equipment
ICS Name:
Other discrete semiconductor devices
Publish Date:
2026-01-30
Implement Date:
2026-01-30
Scope
This document is applicable to the evaluation of the environmental compatibility and long-term reliability of electrostatic clamping plates used in ion implantation equipment. This document specifies the general requirements, test methods, test reports, and safety precautions for extreme environmental compatibility and long-term reliability tests of electrostatic clamping plates used in ion implantation equipment.
Development Information
Related Standards
GB/T 15449-1995
Active
GB/T 15449-1995 Blank detail-specification for field-effect transistors for case-rated swatching application
GB/T 15450-1995
Abolished
GB/T 15450-1995 Blank detail specification for silicon dual-gate field-effect transistors
GB/T 15529-1995
Active
GB/T 15529-1995 Blank detail specification for LED numeric displays
GB/T 32817-2016
Active
GB/T 32817-2016 Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS
GB/T 41852-2022
Active