YS/T 987-2021 Active Industry standards-Non-ferrous metals

YS/T 987-2021 The determination of carbon content in chlorosilanes by gas chromatography-mass spectrometry

YS/T 987-2021 The determination of carbon content in chlorosilanes by gas chromatography-mass spectrometry

Publish Date: 2021-12-02 Implement Date: 2022-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 987-2021
Standard Type: Industry standards
Standard Status: Active
is_force_gb: no
CCS Name: Analysis methods for semi-metallic and semiconductor materials
ICS Name: Chemical analysis of metal materials
Publish Date: 2021-12-02
Implement Date: 2022-04-01

Scope

This document is applicable to the determination of the content of carbon impurities in chlorosilane (including methyl dichlorosilane, methyl trichlorosilane, dimethyl monochlorosilane, dimethyl dichlorosilane, and trimethyl monochlorosilane in chlorosilane, collectively referred to as methyl chlorosilane), with a measurement range (mass fraction) of 0.000 010% to 0.10%.

Development Information

Replace the following standards

Related Standards

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