GB/T 3656-1983
Replaced
GB/T 14140-2025
Active
National standards
GB/T 14140-2025 Test method for measuring diameter of semiconductor wafer
GB/T 14140-2025 Test method for measuring diameter of semiconductor wafer
Price:
$ 50
Basic Information
Standard Code:
GB/T 14140-2025
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Analysis methods for semi-metallic and semiconductor materials
ICS Name:
\nMetal material testing
Publish Date:
2025-08-01
Implement Date:
2026-02-01
Pages:
12 pages
Scope
This document describes the methods of testing the diameter of semiconductor wafers using profilometers, micrometers, and vernier calipers.
This document is applicable to the testing of the diameter of circular semiconductor wafers, with a test range of a nominal diameter not exceeding 300 mm. This document is not applicable to the testing of the non-roundness of wafers.
Development Information
Replace the following standards
Referenced Standards
Related Standards
GB/T 3657-1983
Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced