GB/T 26113-2010 Active National standards

GB/T 26113-2010 Micro-electromechanical system technology—General rules for the assessment of micro-geometrical parameters

Publish Date: 2011-01-10 Implement Date: 2011-10-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 26113-2010

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Microcircuit

ICS Name: Integrated circuits, microelectronics

Publish Date: 2011-01-10

Implement Date: 2011-10-01

Pages: 11 pages

Scope

This standard specifies the basic principles, evaluation elements, evaluation procedures, evaluation methods, and evaluation rules for the evaluation of microgeometric quantities.
This standard is applicable to enterprises, research institutions, testing institutions, and other organizations engaged in the research, design, production, and testing of micro-electromechanical technologies and products.

Development Information

Word Count: 18 Thousand words Pages: 11 pages

Referenced Standards

GB/T 3505-2000 Geometrical product specifications (GPS)—Surface texture:Profile method—Terms, definitions and surface texture parameters GB/T 3505-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Terms,definitions and surface texture parameters GB/T 18779.2-2004 Geometrical Product Specifications(GPS)—Inspection by measurement of workpieses and measuring equipment—Part 2:Guide to the estimation of uncertainty in GPS measurement, in calibration of measuring equipment and in product verification GB/T 18779.2-2023 Geometrical product specifications(GPS)—Inspection by measurement of workpieces and measuring equipment—Part 2:Guidance for the estimation of uncertainty in GPS measurement,in calibration of measuring equipment and in product verification GB/T 26111-2010 Micro-electromechanical system technology—Terms GB/T 26111-2023 Micro-electromechanical system technology—Terms

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