GB/T 4298-1984
Abolished
GB/T 44839-2024
Active
National standards
GB/T 44839-2024 Micro-electromechanical systems(MEMS) technology—Micro-pillar compression test for MEMS materials
GB/T 44839-2024 Micro-electromechanical systems(MEMS) technology—Micro-pillar compression test for MEMS materials
Price:
$ 57
Basic Information
Standard Code:
GB/T 44839-2024
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Micro-components
ICS Name:
Other discrete semiconductor devices
Publish Date:
2024-10-26
Implement Date:
2025-02-01
Pages:
16 pages
Scope
This document describes a micro-pillar compression test method for high-precision and high-reproducibility measurement of the compression properties of MEMS materials, with moderate difficulty in sample fabrication. The method measures the relationship between uniaxial compression stress and strain of the sample, and obtains the sample's compression elastic modulus and yield strength. The sample is fabricated on a rigid (or high-stiffness) substrate using micro-machining technology, with a height-to-diameter ratio (the ratio of height to diameter) greater than 3 being ideal. This document is applicable to the testing of micro-pillars with a height of less than 100 μm, prepared from metals, ceramics, polymers, and other materials.
Development Information
Referenced Standards
IEC 62047-8
Adopt standards
IEC 62047-10:2011
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