GB/T 4298-1984
Abolished
GB/T 44919-2024
Active
National standards
GB/T 44919-2024 Micro-electromechanical systems(MEMS) technology—Bulge test method for measuring mechanical properties of thin films
GB/T 44919-2024 Micro-electromechanical systems(MEMS) technology—Bulge test method for measuring mechanical properties of thin films
Price:
$ 74
Basic Information
Standard Code:
GB/T 44919-2024
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Micro-components
ICS Name:
Other discrete semiconductor devices
Publish Date:
2024-11-28
Implement Date:
2024-11-28
Pages:
24 pages
Scope
This document describes the method of swelling test for window films. The samples are prepared from micron/nanometer-structured film materials, including metal, ceramic, and polymer films, which are used in microelectromechanical systems (MEMS), micromachinery, and other fields. The film thickness ranges from 0.1 μm to 10 μm. The width of square and rectangular windows ranges from 0.5 mm to 4 mm, and the diameter of circular windows ranges from 0.5 mm to 4 mm.
This document is applicable to conducting elastic modulus and residual stress tests on window film samples under ambient temperature conditions by applying uniform pressure to them.
Development Information
Referenced Standards
IEC 62047-2:2006
Adopt standards
IEC 62047-17:2015
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