GB/T 4855-1984
Abolished
GB/T 38447-2020
Active
National standards
GB/T 38447-2020 Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration
GB/T 38447-2020 Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration
Basic Information
Standard Code:
GB/T 38447-2020
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Microcircuit
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2020-03-06
Implement Date:
2020-07-01
Pages:
18 pages
Scope
This standard specifies the test methods for resonance fatigue tests of MEMS structures, including equipment, test environment, sample requirements, test conditions, and test procedures. This standard is applicable to resonance fatigue tests of MEMS structures.
Development Information
Referenced Standards
GB/T 2298-1991 Mechanical vibration and shock—Terminology
GB/T 2298-2010 Mechanical vibration,shock and condition monitoring—Vocabulary
GB/T 10623-1989 Metallic materials—Terms of mechanical test
GB/T 10623-2008 Metallic material—Mechanical testing—Vocabulary
GB/T 26111-2010 Micro-electromechanical system technology—Terms
GB/T 26111-2023 Micro-electromechanical system technology—Terms
Related Standards
GB/T 3434-1986
Abolished
GB/T 3434-1986 Families and products of ECL circuits for semiconductor integrated circuits
GB/T 3431.2-1986
Active
GB/T 3431.2-1986 Letter symbols for semiconductor integrated circuits—Letter symbols for function of pins
GB/T 6648-1986
Active
GB/T 6648-1986 Blank detail specification for semiconductor integrated circuit static read/write memories
GB/T 6800-1986
Abolished
GB/T 6800-1986 General principles of measuring methods of audio power amplifiers for semicomductor audio integrated circuits
GB/T 3435-1987
Abolished