GB/T 38976-2020 Active National standards

GB/T 38976-2020 Test method for the oxygen concentration in silicon materials—Inert gas fusion infrared detection method

Publish Date: 2020-07-21 Implement Date: 2021-06-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 38976-2020

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Analysis methods for semi-metallic and semiconductor materials

ICS Name: \nMetal material testing

Publish Date: 2020-07-21

Implement Date: 2021-06-01

Pages: 6 pages

Scope

This standard specifies the method of testing the oxygen content in silicon materials using inert gas melting and infrared technology.
This standard is applicable to the testing of oxygen content in silicon single crystals and polycrystalline silicon with different conductivity types and different resistivity ranges, with a testing range of 2.5×1015 cm-3 (0.05 ppma) to 2.5×1018 cm-3 (50 ppma).
Note: The oxygen content in silicon materials is calculated in terms of the number of atoms per cubic centimeter.