GB/T 4855-1984
Abolished
GB/T 42895-2023
Active
National standards
GB/T 42895-2023 Micro-electromechanical systems(MEMS）technology—Bending strength test method for microstructures of silicon based MEMS
GB/T 42895-2023 Micro-electromechanical systems(MEMS）technology—Bending strength test method for microstructures of silicon based MEMS
Basic Information
Standard Code:
GB/T 42895-2023
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Micro-components
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2023-08-06
Implement Date:
2023-12-01
Pages:
11 pages
Scope
This document describes the requirements and testing methods for in-situ bending strength tests of microstructures involved in silicon-based MEMS processing. This document is applicable to bending strength tests of microstructures manufactured using microelectronics processes.
Development Information
Referenced Standards
Related Standards
GB/T 3434-1986
Abolished
GB/T 3434-1986 Families and products of ECL circuits for semiconductor integrated circuits
GB/T 3431.2-1986
Active
GB/T 3431.2-1986 Letter symbols for semiconductor integrated circuits—Letter symbols for function of pins
GB/T 6648-1986
Active
GB/T 6648-1986 Blank detail specification for semiconductor integrated circuit static read/write memories
GB/T 6800-1986
Abolished
GB/T 6800-1986 General principles of measuring methods of audio power amplifiers for semicomductor audio integrated circuits
GB/T 3435-1987
Abolished