DZ/T 0101.12-1994
Active
SJ 21258-2018
Active
Industry standards-Electronics
SJ 21258-2018 Technological verification procedures for dry etching equipment
SJ 21258-2018 Technological verification procedures for dry etching equipment
Price:
$ 30
Basic Information
Standard Code:
SJ 21258-2018
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
2018-01-18
Implement Date:
2018-05-01
Pages:
12 pages
Scope
This standard specifies the general requirements, verification conditions, and verification methods for the process verification of dry etching equipment. This standard applies to the verification of the process performance of dry etching equipment (hereinafter referred to as etching equipment).
Development Information
Referenced Standards
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