GB/T 15862-1995 Replaced National standards

GB/T 15862-1995 Generic specification for ion implantation equipment

GB/T 15862-1995 Generic specification for ion implantation equipment

Publish Date: 1995-12-22 Implement Date: 1996-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 15862-1995
Standard Type: National standards
Standard Status: Replaced
is_force_gb: no
CCS Name: Special processing equipment
ICS Name: Integrated circuits, microelectronics
Publish Date: 1995-12-22
Implement Date: 1996-08-01
Pages: 9 pages

Development Information

Word Count: 15 Thousand words Pages: 9 pages

Superseded by the following standards

Referenced Standards

Related Standards

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