YS/T 937-2013 Active Industry standards-Non-ferrous metals

YS/T 937-2013 Nickel-platinum target

YS/T 937-2013 Nickel-platinum target

Publish Date: 2013-10-17 Implement Date: 2014-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 937-2013

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: Precious metals and their alloys

ICS Name: Other non-ferrous metal products

Publish Date: 2013-10-17

Implement Date: 2014-03-01

Pages: 20 pages

Scope

This standard specifies the requirements, test methods, inspection rules, and markings for nickel-platinum targets, as well as their packaging, transportation, storage, quality certificates, and contract (or order) content.
This standard applies to all types of nickel-platinum targets used in semiconductor films.

Development Information

Word Count: 38 Thousand words Pages: 20 pages

Referenced Standards

GJB 1580A GB/T 1031-1995 Surface roughness parameters and their values GB/T 1031-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Surface roughness parameters and their values GB/T 6394-2002 Metal-methods for estimating the average grain size GB/T 6394-2017 Determination of estimating the average grain size of metal GB/T 14265-1993 General rule of chemical analysis for hydrogen, oxygen, nitrogen, carbon and sulfur in metal's materials GB/T 14265-2017 General rule of chemical analysis for hydrogen,oxygen, nitrogen, carbon and sulfur in metallic materials GB/T 15077-1994 Geometric size measuring methods of precious metals and their alloy materials GB/T 15077-2008 Geometric size measuring methods of precious metals and their alloy materials YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies

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