GB/T 31058-2014 Active National standards

GB/T 31058-2014 Gases for electronic industry—Silicon tetrafluoride

Publish Date: 2014-12-22 Implement Date: 2015-07-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 31058-2014

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Industrial gases

Publish Date: 2014-12-22

Implement Date: 2015-07-01

Pages: 6 pages

Scope

This standard specifies the technical requirements, test methods, marking, packaging, transportation, and storage of silicon tetrafluoride. This standard applies to silicon tetrafluoride prepared by the fluoride method, the thermal decomposition of hexafluorosilicate, and the direct fluorination of elemental silicon. It is mainly used in the electronics industry for plasma etching, P-type doping of light-emitting diodes, ion implantation processes, silicon source for epitaxial deposition and diffusion, and raw material for high-purity quartz glass used in optical fiber. Molecular formula: SiF4. Relative molecular mass: 104.0786128 (based on the international atomic relative mass in 2009).

Development Information

Word Count: 11 Thousand words Pages: 6 pages

Referenced Standards

GB l5258 GB/T 28726-2012 Gas analysis—Gas chromatograph with helium ionization detector 气瓶安全监察规程(2000版) 危险化学品安全管理条例(2002版) 特种设备安全监察条例(2009版) GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB/T 5099-1994 Seamless steel gas cylinders GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders GB 7144-1999 Colored cylinder mark for gases GB/T 7144-2016 Coloured cylinder mark for gases GB 14194-1993 Rules for filling of permanent gas cylinders GB/T 14194-2006 Rules for filling of permanent gas cylinders GB/T 14194-2017 Rules for filling of compressed gas cylinders GB 16804-1997 Precautionary labels for gas cylinders GB/T 16804-2011 Precautionary labels for gas cylinders GB/T 26571-2011 Specification for the shelf life of a specialty gas GB/T 28727-2012 Gas analysis—Determination of sulfides—Gas chromatograph with flame photometric detector GB/T 28727-2025 Gas analysis—Determination of the contents of trace sulfur compounds in gases—Gas chromatography with flame photometric detector

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