T/CCGA 90004-2023 Active Group standards

T/CCGA 90004-2023 Test method for efficiency of decomposition removal of exhaust gas treatment equipment used in pan-semiconductor industry

T/CCGA 90004-2023 Test method for efficiency of decomposition removal of exhaust gas treatment equipment used in pan-semiconductor industry

Publish Date: 2023-12-18 Implement Date: 2024-01-18 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/CCGA 90004-2023
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: Oil
ICS Name: Pollution, pollution control, and protection
Publish Date: 2023-12-18
Implement Date: 2024-01-18

Scope

Scope: This document specifies the test method for the decomposition and removal efficiency of exhaust gas treatment equipment for general semiconductors. This document is applicable to evaluating the decomposition and removal efficiency of exhaust gas treatment equipment using Fourier transform infrared spectrometers and portable gas detectors. Other instruments can be referenced for implementation; Main technical content: This document is applicable to evaluating the decomposition and removal efficiency of exhaust gas treatment equipment using Fourier transform infrared spectrometers and portable gas detectors. Other instruments can be referenced for implementation.

Development Information

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