GB 50646-2020 Technical standard for specialty gas system engineering
GB 50646-2020 Technical standard for specialty gas system engineering
Basic Information
Scope
In order to implement the current national laws and regulations in the engineering design, construction, and acceptance of special gas systems and supporting equipment in electronic industry factories, meet the requirements of product production, ensure personal and property safety, achieve safe application, advanced technology, environmental protection, energy conservation, and economic rationality, this standard is formulated. This standard applies to the design, construction, and acceptance of new, modified, and expanded special gas systems in the electronic industry. This standard does not apply to the engineering design, construction, and acceptance of special gas production, purification, and filling equipment and supporting devices. The design, construction, and acceptance of special gas systems shall comply with the provisions of this standard, as well as the relevant national standards currently in force.