GB/T 17518-1998
Replaced
T/CNIA 0062-2020
Active
Group standards
T/CNIA 0062-2020 Highly pure hydrofluoric acid for electronic industry
T/CNIA 0062-2020 Highly pure hydrofluoric acid for electronic industry
Price:
$ 20.00
Basic Information
Standard Code:
T/CNIA 0062-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Non-ferrous metal mines
ICS Name:
Comprehensive Inorganic Chemistry
Publish Date:
2020-05-27
Implement Date:
2020-08-01
Scope
Main technical content: This standard specifies the grading, requirements, test methods, inspection rules, marking, packaging, transportation, storage, quality certificates, order forms (or contracts) and safety of high-purity hydrofluoric acid used in the electronics industry. This standard applies to high-purity hydrofluoric acid used in the electronics industry (hereinafter referred to as high-purity hydrofluoric acid). This product is mainly used for cleaning and etching of silicon wafers and chips for electronic-grade polysilicon, liquid crystal displays, integrated circuits, and very large-scale integrated circuits
Development Information
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