GB/T 32815-2016 Active National standards

GB/T 32815-2016 Silicon-based MEMS fabrication technology—Specification for criterion of the bulk silicon piezoresistance process

Publish Date: 2016-08-29 Implement Date: 2017-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 32815-2016

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Microcircuit

ICS Name: Integrated circuits, microelectronics

Publish Date: 2016-08-29

Implement Date: 2017-03-01

Pages: 24 pages

Scope

This standard specifies the process requirements and quality inspection requirements that should be followed when manufacturing MEMS devices using the bulk silicon piezoresistive process.
This standard applies to the processing and quality inspection of the bulk silicon piezoresistive processing technology based on back cavity etching and silicon-glass bonding in silicon-based MEMS manufacturing technology.

Development Information

Word Count: 42 Thousand words Pages: 24 pages

Referenced Standards

GB/T 19022-2003 Measurement management systems—Requirements for measurement processes and measuring equipment GB/T 19022.2-2000 Quality assurance for measuring equipment—Part 2:Guidelines for control of measurement processes GB/T 26111-2010 Micro-electromechanical system technology—Terms GB/T 26111-2023 Micro-electromechanical system technology—Terms GB 50073-2013 Code for design of clean room

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