GB/T 4855-1984
Abolished
GB/T 38446-2020
Active
National standards
GB/T 38446-2020 Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films
GB/T 38446-2020 Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films
Basic Information
Standard Code:
GB/T 38446-2020
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Microcircuit
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2020-03-06
Implement Date:
2020-10-01
Pages:
13 pages
Scope
This standard specifies the test method and data processing for the tensile strength of ribbon-like thin films. This standard is applicable to samples with a thickness of between 50 nm and several micrometers and a length-to-thickness ratio greater than 300. It can also be used for quality monitoring of ribbon-like thin film structures in MEMS products.
Development Information
Referenced Standards
Related Standards
GB/T 3434-1986
Abolished
GB/T 3434-1986 Families and products of ECL circuits for semiconductor integrated circuits
GB/T 3431.2-1986
Active
GB/T 3431.2-1986 Letter symbols for semiconductor integrated circuits—Letter symbols for function of pins
GB/T 6648-1986
Active
GB/T 6648-1986 Blank detail specification for semiconductor integrated circuit static read/write memories
GB/T 6800-1986
Abolished
GB/T 6800-1986 General principles of measuring methods of audio power amplifiers for semicomductor audio integrated circuits
GB/T 3435-1987
Abolished