GB/T 34898-2017 Active National standards

GB/T 34898-2017 Micro electromechanical system technology—Test method for thenonlinear vibration of the MEMS resonant sensitive element

Publish Date: 2017-11-01 Implement Date: 2018-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34898-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Microcircuit

ICS Name: Integrated circuits, microelectronics

Publish Date: 2017-11-01

Implement Date: 2018-05-01

Pages: 13 pages

Scope

This standard specifies the test method for the non-linear vibration characteristics of MEMS resonant sensitive elements (hereinafter referred to as sensitive elements) in resonant sensors. This standard is applicable to the testing of non-linear vibration characteristics and frequency offset of the sensitive element closed-loop system during the development and production of sensitive elements. Other non-MEMS sensitive elements can be used for reference.

Development Information

Word Count: 24 Thousand words Pages: 13 pages

Referenced Standards

GB/T 2298-1991 Mechanical vibration and shock—Terminology GB/T 2298-2010 Mechanical vibration,shock and condition monitoring—Vocabulary GB/T 26111-2010 Micro-electromechanical system technology—Terms GB/T 26111-2023 Micro-electromechanical system technology—Terms GB/T 26112-2010 Micro-electromechanical system technology—General rules for the assessment of micro-mechanical parameters

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