GB/T 17359-2012 Microbeam analysis—Quantitative analysis using energy dispersive spectrometry

Scope

This standard specifies the method for quantitative analysis of specific points or specific areas on a sample using an energy spectrometer installed on a scanning electron microscope (SEM) or an electron probe microanalyzer (EPMA). Quantitative analysis refers to expressing the content of elements in terms of mass fraction (percentage). Correctly identifying all elements in the sample is an essential component of quantitative analysis, so this standard also includes this aspect. This standard provides various quantitative analysis methods using energy spectrometry, and is applicable to the quantitative analysis of elements with a mass fraction greater than 1% using reference materials or the "no standard sample" procedure. This standard provides higher analysis confidence for elements with atomic numbers greater than 10.
This standard also specifies the analysis method for light elements with atomic numbers less than 11.
Note: When there are no overlapping peaks and the corresponding characteristic X-rays are strongly excited, the energy spectrometer can also measure elements with a mass fraction at the 0.1% level. This standard is mainly applied to the quantitative analysis of surface-flat samples, and the basic method is also applicable to the analysis of surface-uneven samples, but additional uncertainty components will be introduced.
At present, there are no widely recognized accurate energy spectrometer (EDS) quantitative analysis methods for light elements. The following are several commonly used EDS methods for light element analysis:
a) Measuring peak area and comparing peak intensity. For the reasons described in Appendix D, the uncertainty of the analysis results for light elements is greater than that for heavy elements.
b) When the light element in the sample is chemically combined with heavy elements (Z > 10) in a stoichiometric manner, the concentration of the light element can be determined by comparing its concentration

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