GB/T 17359-2023 Microbeam analysis—Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above

Scope

This document describes the method of quantitative analysis of specific points or specific areas on a sample using an energy spectrometer installed on a scanning electron microscope (SEM) or an electron probe microanalyzer (EPMA). Quantitative analysis refers to the expression of the element content in terms of mass fraction (percentage). Correctly identifying all elements in the sample is an essential component of quantitative analysis, so this document also includes this aspect. This document describes various quantitative analysis methods using energy spectrometry.
This document is applicable to the quantitative analysis of elements with a mass fraction greater than 1% and an atomic number Z > 10, using reference materials or the "no standard" procedure.
This document also provides information on analysis methods for light elements with an atomic number less than 11.
Note: When there are no overlapping peaks and the corresponding characteristic X-rays are strongly excited, the energy spectrometer can also measure elements with a mass fraction at the 0.1% level. This document is mainly used for the quantitative analysis of samples with a smooth surface, and the basic method is also applicable to the analysis of samples with an uneven surface, but additional uncertainty components will be introduced.
At present, there are no generally recognized accurate energy spectrometry (EDS) quantitative analysis methods for light elements. The following are several commonly used EDS methods for light element analysis.
a) Measuring peak area and comparing peak intensity. For the reasons described in Appendix A, the uncertainty of the analysis results for light elements is greater than that for heavy elements.
b) When the light element in the sample is chemically combined with heavy elements (Z > 10) in a stoichiometric manner, the concentration of this light element can be determined by the ratio of its concentration to that of other element

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