DZ/T 0101.12-1994
Active
SJ 21262-2018
Active
Industry standards-Electronics
SJ 21262-2018 Technical requirements for MEMS inertial device chip measurement on wafer
SJ 21262-2018 Technical requirements for MEMS inertial device chip measurement on wafer
Price:
$ 30
Basic Information
Standard Code:
SJ 21262-2018
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
2018-01-18
Implement Date:
2018-05-01
Pages:
10 pages
Scope
This standard specifies the general requirements for personnel, environment, safety, equipment, and instruments involved in on-wafer testing of the electrical parameters of sensitive chips in MEMS inertial devices, as well as detailed requirements for the testing process, test preparation, test system connection, and parameter testing
Development Information
Referenced Standards
Related Standards
JJG 204-1980
Active
JJG 204-1980 Meteorological Ventilation Psychrometer
SC 53-1980
Active
SC 53-1980 Transfer blade hydraulic steering gear repair quality standard
DZ 4-1981
Replaced
\nDZ 4-1981 Method for Compiling Product Models of Geological Instrumentation Equipment
SC 69-1982
Active
SC 69-1982 ZSS-12 Flash-type seawater desalination production device technical specifications
SC 72-1982
Active