PDF
GB/T 11164-2011 Active
GB/T 11164-2011 Vacuum coating plant generic specification
Abstract
This standard specifies the technical requirements, test methods, inspection rules, and requirements for marking, packaging, transportation, and storage of vacuum coating equipment.
This standard applies to vacuum evaporation, sputtering, and ion plating vacuum coating equipment (hereinafter referred to as "equipment") with a pressure range of 10-5 Pa to 10-3 Pa.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 11164-2011 |
| CCS | Vacuum technology and equipment |
| ICS | Vacuum technology |
| Implement Date | 2012-06-01 |
Price
$ 50
Subtotal
$ 50
Tax
$ 0.00
Order Total (incl. tax)
$ 50