MT/T 707-1997
Replaced
T/GVS 015-2024
Active
Group standards
T/GVS 015-2024 Remote plasma source dissociation rate testing method
T/GVS 015-2024 Remote plasma source dissociation rate testing method
Price:
$ 20.00
Basic Information
Standard Code:
T/GVS 015-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Instruments and meters
ICS Name:
Other standards related to analytical chemistry
Publish Date:
2024-10-10
Implement Date:
2024-10-10
Scope
Scope: This document specifies the terms and definitions, principles, symbols and abbreviations, test environment conditions, instruments and samples, operation preparation, test steps, data processing, measurement uncertainty, and test reports for the dissociation rate test of remote plasma sources. This document is applicable to applications such as semiconductor surface treatment and cleaning, where the gas flow rate is 60 SLM and the power is less than 40 kW for remote plasma sources. Main technical content: It specifies the terms and definitions, principles, symbols and abbreviations, test environment conditions, instruments and samples, operation preparation, test steps, data processing, measurement uncertainty, and test reports for the dissociation rate test of remote plasma sources.
Development Information
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