T/ICMTIA 5.1-2020 Active Group standards

T/ICMTIA 5.1-2020 ArF dry photoresist used in integrated circuits

T/ICMTIA 5.1-2020 ArF dry photoresist used in integrated circuits

Publish Date: 2020-12-31 Implement Date: 2021-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ICMTIA 5.1-2020

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: High-purity reagents and high-purity substances

ICS Name: Semiconductor materials

Publish Date: 2020-12-31

Implement Date: 2021-03-01

Scope

Scope: This document is applicable to ArF dry photoresists for integrated circuits. Main technical content: This document specifies the requirements, test methods, inspection standards, and packaging, transportation, and storage requirements for ArF dry photoresists.

Development Information

Same series standard

T/ICMTIA 5.2-2020 ArF immersion photomask for integrated circuits T/ICMTIA 5.3-2020 The method of inspecting ArF photoresist used in integrated circuits using optical lithography

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