GB/T 24582-2023 Active National standards

GB/T 24582-2023 Test method for measuring surface metal impurity content of polycrystalline silicon—Acid extraction-inductively coupled plasma mass spectrometry method

Publish Date: 2023-08-06 Implement Date: 2024-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB/T 24582-2023

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Analysis methods for semi-metallic and semiconductor materials

ICS Name: \nMetal material testing

Publish Date: 2023-08-06

Implement Date: 2024-03-01

Pages: 6 pages

Scope

This document describes a method for extracting metal impurities from the surface of polycrystalline silicon using acid, and quantitatively detecting the content of metal impurities on the surface of polycrystalline silicon using an inductively coupled plasma mass spectrometer. This document is suitable for determining the content of alkali metals, alkaline earth metals, and first-row transition elements such as sodium, potassium, calcium, iron, nickel, copper, zinc, and aluminum on the surface of solar-grade and electronic-grade polycrystalline silicon, with a detection range of 0.01 ng/g.