GB/T 24582-2009 Test method for measuring surface metal contamination of polycrystalline silicon by acid extraction-inductively coupled plasma mass spectrometry

Scope

1.1 This standard specifies the method for quantitatively detecting trace amounts of metal impurities on the surface of polycrystalline silicon blocks by extracting them with acid and using an inductively coupled plasma mass spectrometer.
1.2 This standard is applicable to the detection of alkali metals, alkaline earth metals, and first-row transition elements such as sodium, potassium, calcium, iron, nickel, copper, zinc, and other elements.
1.3 This standard is applicable to the detection of metal contaminants on the surfaces of various rods, blocks, granules, and flakes. Due to the irregular shapes of blocks, sheets, or granules, it is difficult to accurately determine their area. Therefore, the results are calculated based on the weight of the samples, with the weight of the samples used ranging from 50 g to 300 g, and the detection limit being 0.01 ng/mL.
1.4 The concentration, composition, temperature, and extraction time of the acid determine the depth of surface corrosion and the extraction efficiency of surface contaminants. In this experimental method, the weight of the samples corroded is less than 1% of the total weight of the samples.
1.5 This standard is applicable to the determination of samples weighing 25 g to 5,000 g. For the purpose of arbitration, this experimental method stipulates that the weight of the samples should be approximately 300 g.

Development Information

Superseded by the following standards

Referenced Standards

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