T/TMAC 336-2026 Active Group standards

T/TMAC 336-2026 Ion-implantation equipment ceramic electrostatic chuck

Publish Date: 2026-01-30 Implement Date: 2026-01-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/TMAC 336-2026

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Medical electronic instruments and equipment

ICS Name: Other discrete semiconductor devices

Publish Date: 2026-01-30

Implement Date: 2026-01-30

Scope

This document is applicable to the production and manufacturing of ceramic electrostatic clamping plates for ion implantation equipment. This document specifies the general requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage for ceramic electrostatic clamping plates used in ion implantation equipment.

Development Information

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