GB/T 11093-1989
Replaced
T/ICMTIA 5.2-2020
Active
Group standards
T/ICMTIA 5.2-2020 ArF immersion photomask for integrated circuits
T/ICMTIA 5.2-2020 ArF immersion photomask for integrated circuits
Price:
$ 31.00
Basic Information
Standard Code:
T/ICMTIA 5.2-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
High-purity reagents and high-purity substances
ICS Name:
Semiconductor materials
Publish Date:
2020-12-31
Implement Date:
2021-03-01
Scope
Scope: This document is applicable to ArF immersion photoresists for integrated circuits; Main technical content: This document specifies the requirements, test methods, inspection standards, and packaging, transportation, and storage of ArF immersion photoresists.
Development Information
Same series standard
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced