T/NXCL 004-2021 Active Group standards

T/NXCL 004-2021 Rotating Silicon Target Material

Publish Date: 2021-11-11 Implement Date: 2021-11-11 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/NXCL 004-2021

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Metallurgical machinery and equipment

ICS Name: Semiconductor materials

Publish Date: 2021-11-11

Implement Date: 2021-11-11

Scope

Main technical content: This document specifies the terms and definitions of rotating silicon targets, technical requirements, test methods, inspection specifications, marking, packaging, transportation, storage, and other aspects. The technical requirements include basic requirements, materials, chemical composition, physical properties, physical specifications, appearance quality, internal defects, crystal morphology of rotating silicon targets, lap rate, surface quality, and liner material. The test methods include arbitration analysis methods for chemical composition, testing methods for physical properties, and measurement methods for physical specifications, appearance quality, internal defects, crystal morphology, grain size, lap rate, roundness, and coaxiality. The inspection rules include inspection and acceptance, batching, inspection items, arbitration sampling and sampling, and determination of inspection results.