GB/T 21795-2008
Active
T/CCGA 90004-2023
Active
Group standards
T/CCGA 90004-2023 Test method for efficiency of decomposition removal of exhaust gas treatment equipment used in pan-semiconductor industry
T/CCGA 90004-2023 Test method for efficiency of decomposition removal of exhaust gas treatment equipment used in pan-semiconductor industry
Price:
$ 20.00
Basic Information
Standard Code:
T/CCGA 90004-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Oil
ICS Name:
Pollution, pollution control, and protection
Publish Date:
2023-12-18
Implement Date:
2024-01-18
Scope
Scope: This document specifies the test method for the decomposition and removal efficiency of exhaust gas treatment equipment for general semiconductors. This document is applicable to evaluating the decomposition and removal efficiency of exhaust gas treatment equipment using Fourier transform infrared spectrometers and portable gas detectors. Other instruments can be referenced for implementation; Main technical content: This document is applicable to evaluating the decomposition and removal efficiency of exhaust gas treatment equipment using Fourier transform infrared spectrometers and portable gas detectors. Other instruments can be referenced for implementation.
Development Information
Related Standards
GB/T 21796-2008
Replaced
GB/T 21796-2008 Chemicals—Activated sludge,respiration inhibition test
GB/T 21800-2008
Active
GB/T 21800-2008 Chemicals—Bioconcentration—Flow-through fish test
GB/T 21801-2008
Active
GB/T 21801-2008 Chemicals—Ready biodegradability—Manometric respirometry test
GB/T 21802-2008
Active
GB/T 21802-2008 Chemicals—Ready biodegradability—Modified MITI test (Ⅰ)
GB/T 21803-2008
Active