GB/T 8446.2-2022
Active
T/CITS 159-2024
Active
Group standards
T/CITS 159-2024 The specification for using radio frequency power supply for plasma
T/CITS 159-2024 The specification for using radio frequency power supply for plasma
Price:
$ 20.00
Basic Information
Standard Code:
T/CITS 159-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Integrated Electromechanical Components
Publish Date:
2024-10-22
Implement Date:
2024-10-22
Scope
Scope: This document specifies the product classification, technical requirements, design requirements, test methods, inspection rules, marking, packaging, transportation, and storage of RF power supplies for plasma applications. This document is applicable to various industrial and scientific plasma application scenarios. Main technical content: This document specifies the product classification, technical requirements, design requirements, test methods, inspection rules, marking, packaging, transportation, and storage of RF power supplies for plasma applications. This document is applicable to various industrial and scientific plasma application scenarios.
Development Information
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