GB/T 11093-1989
Replaced
T/ICMTIA PC007-2021
Active
Group standards
T/ICMTIA PC007-2021 Acidic fluorinated hydrocarbons used in integrated circuits
T/ICMTIA PC007-2021 Acidic fluorinated hydrocarbons used in integrated circuits
Price:
$ 31.00
Basic Information
Standard Code:
T/ICMTIA PC007-2021
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
High-purity reagents and high-purity substances
ICS Name:
Semiconductor materials
Publish Date:
2021-05-31
Implement Date:
2021-07-30
Scope
Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of hydrofluoric acid for integrated circuits. This document is applicable to hydrofluoric acid used in the manufacturing process of integrated circuits. Molecular formula: HF; Relative molecular mass: 20.01 (based on the 2014 International Relative Atomic Mass).
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced