GB/T 25915.8-2010 Cleanrooms and associated controlled environments—Part 8:Classification of airborne molecular contamination

Scope

〖HT5H〗〖STFZ〗1 Scope 〖ST〗〖HJ〗[HJ*5/9]
This part of GB/T 25915 classifies air molecular contamination (AMC) based on the concentration of specific chemical substances (species, groups, and categories) in cleanrooms and related controlled environments. At the same time, this part provides procedures including detection methods, analysis methods, and time-weighted coefficients in the technical requirements for classification.
This part currently only considers AMC concentrations of 100 g/m3 to 10-12 g/m3 under the operating conditions of cleanrooms.
This part does not involve industries, processes, and productions where air molecular substances exist but are not considered to pose risks to products or processes.
This part does not intend to explore the characteristics of air molecular contaminants.
This part does not include the classification of surface molecular contamination.

Development Information

Same series standard

Superseded by the following standards

Referenced Standards

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