GB/T 25915.8-2021 Cleanrooms and associated controlled environments—Part 8:Classification of air cleanliness by chemical concentration(ACC)
GB/T 25915.8-2021 Cleanrooms and associated controlled environments—Part 8:Classification of air cleanliness by chemical concentration(ACC)
Basic Information
Scope
This document classifies air chemical pollution based on the concentrations of specific chemical substances (species, groups, or categories) in cleanrooms and related controlled environments. At the same time, the document provides technical requirements for classification, including detection methods, analysis methods, and time-weighted coefficients.
At present, this document only considers the concentrations of chemical pollutants in the air of cleanrooms ranging from 100 g/m3 to 10-12 g/m3 under operating conditions.
This document does not involve industries, processes, or productions where chemical substances exist in the air but are not considered to pose a risk of harm to products or processes.
This document does not intend to explore the characteristics of air chemical pollutants.
This document does not include the classification of surface chemical contamination.