GB/T 32280-2015 Replaced National standards

GB/T 32280-2015 Test method for warp of silicon wafers—Automated non-contact scanning method

GB/T 32280-2015 Test method for warp of silicon wafers—Automated non-contact scanning method

Publish Date: 2015-12-10 Implement Date: 2017-01-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 32280-2015

Standard Type: National standards

Standard Status: Replaced

is_force_gb: no

CCS Name: \nTest methods for the physical properties of metals

ICS Name: \nMetal material testing

Publish Date: 2015-12-10

Implement Date: 2017-01-01

Pages: 12 pages

Scope

This standard specifies a non-destructive, automatic non-contact scanning test method for the warpage of silicon wafers. This standard is applicable to the warpage test of clean and dry silicon wafers with a diameter of not less than 50 mm and a thickness of not less than 100 μm, which have undergone cutting, grinding, corrosion, polishing, etching, epitaxy, or other surface treatments. This method can be used to monitor the warpage of silicon wafers caused by thermal effects and/or mechanical effects, and can also be used for the warpage test of other semiconductor wafers such as gallium arsenide and sapphire.

Development Information

Word Count: 22 Thousand words Pages: 12 pages

Superseded by the following standards

GB/T 32280-2022 Test method for warp and bow of silicon wafers—Automated non-contact scanning method

Referenced Standards

GB/T 6620-1995 Test method for measuring warp on silicon slices by noncontact scanning GB/T 6620-2009 Test method for measuring warp on silicon slices by noncontact scanning GB/T 14264-1993 Semiconductor materials—Terms and definitions GB/T 14264-2009 Semiconductor materials—Terms and definitions GB/T 14264-2024 Terminology of semiconductor materials GB/T 29507-2013 Test method for measuring flatness,thickness and total thickness variation on silicon wafers—Automated non-contact scanning GB 50073-2013 Code for design of clean room

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