GB/T 15909-2009 Replaced National standards

GB/T 15909-2009 Gas for electronic industry—Silane

GB/T 15909-2009 Gas for electronic industry—Silane

Publish Date: 2009-10-30 Implement Date: 2010-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 15909-2009

Standard Type: National standards

Standard Status: Replaced

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Industrial gases

Publish Date: 2009-10-30

Implement Date: 2010-05-01

Pages: 8 pages

Scope

This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of silane gas.
This standard is applicable to the epitaxial deposition of polysilicon and monocrystalline silicon, the low-temperature chemical vapor deposition of silicon dioxide, and the deposition of amorphous silicon films in the electronics industry.
Molecular formula: SiH4.
Relative molecular mass: 32.117 (based on the 2005 International Atomic Mass Table).

Development Information

Word Count: 14 Thousand words Pages: 8 pages

Replace the following standards

GB/T 15909-1995 Gas for electronic industry—Silane

Superseded by the following standards

GB/T 15909-2017 Gas for electronic industry—Silane

Referenced Standards

GB 190-2009 Packing symbol of dangerous goods 气瓶安全监察规程压力容器安全技术监察规程 GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB/T 5099-1994 Seamless steel gas cylinders GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders GB/T 5832.1-2003 Determination of moisture in gases—Part 1:Electrolytic method GB/T 5832.1-2016 Gas analysis—Determination of moisture—Part 1:Electrolytic method GB 7144-1999 Colored cylinder mark for gases GB/T 7144-2016 Coloured cylinder mark for gases GB/T 8984-2008 Determination of carbon monoxide,carbon dioxide and hydrocarbon in gases—Gas chromatographic method GB/T 8984.1-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 1:Determination of carbon monoxide,carbon dioxide and mathane in the gases—Gas chromatographic method GB/T 8984.2-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 2:Determination of total content of carbon monoxide,carbon dioxide and hydrocarbon in gases—Gas chromatographic method GB/T 8984.3-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 3:Determination of total hydrocarbon in gases—Flame ionization method GB/T 11640-2001 Seamless aluminium alloy gas cylinder GB/T 11640-2011 Seamless aluminum alloy gas cylinders GB/T 11640-2021 Seamless aluminium alloy gas cylinders GB 14193-1993 Rules for filling of liquefied gas cylinders GB/T 14193-2009 Rules for filling of liquefied gas cylinders GB/T 14193.1-2025 Rules for the filling of liquefied gas cylinders—Part1:Industrial gas cylinder GB/T 8984-2025 Gas analysis—Determination of the contents of trace carbon monoxide, carbon dioxide and hydrocarbon in gases—Gas chromatography with flame ionization detector

Related Standards

GB 4962-1985 Replaced

GB 4962-1985 Technical safety regulation for gaseous hydrogen use

Publish Date: 1985-03-01

GB/T 8981-1988 Replaced

GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method

Publish Date: 1988-03-15

GB/T 10627-1989 Replaced

GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods

Publish Date: 1989-03-01

GB/T 10628-1989 Replaced

GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods

Publish Date: 1989-03-22

GB 13548-1992 Replaced

GB 13548-1992 General principle of safety assessment for phosgene and its products plant

Publish Date: 1992-06-29

GB 13591-1992 Replaced

GB 13591-1992 Rules for the filling of dissolved acetylene

Publish Date: 1992-08-05