GB 4962-1985
Replaced
GB/T 15909-2017
Active
National standards
GB/T 15909-2017 Gas for electronic industry—Silane
GB/T 15909-2017 Gas for electronic industry—Silane
Basic Information
Standard Code:
GB/T 15909-2017
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Industrial gases and chemical gases
ICS Name:
Industrial gases
Publish Date:
2017-05-31
Implement Date:
2017-12-01
Pages:
11 pages
Scope
This standard specifies the technical requirements, test methods, marking, packaging, storage and transportation, and safety aspects of silane gas. This standard applies to silane prepared by the magnesium silicide method, the aluminum sodium hydride reduction of silicon tetrafluoride method, and the chlorosilane disproportionation process. It is mainly used in the production of high-purity polycrystalline silicon, low-temperature chemical vapor deposition of silicon dioxide, chemical vapor deposition of silicon nitride, polycrystalline silicon isolation layers, polycrystalline silicon ohmic contact layers, and heterogeneous or homogeneous silicon epitaxial growth raw materials, as well as ion implantation sources and laser media. It can also be used in the production of solar cells, optical fibers, and photoelectric sensors. Molecular formula: SiH4. Relative molecular mass: 32.117 (based on the 2011 International Relative Atomic Mass).
Development Information
Replace the following standards
Referenced Standards
危险化学品安全管理条例
特种设备安全监察条例
GB 190-1990 Labels for packages of dangerous goods
GB 190-2009 Packing symbol of dangerous goods
GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling
GB/T 5099-1994 Seamless steel gas cylinders
GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa
GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders
GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders
GB/T 5832.1-2003 Determination of moisture in gases—Part 1:Electrolytic method
GB/T 5832.1-2016 Gas analysis—Determination of moisture—Part 1:Electrolytic method
GB 7144-1999 Colored cylinder mark for gases
GB/T 7144-2016 Coloured cylinder mark for gases
GB/T 11446.1-1997 Electronic grade water
GB/T 11446.1-2013 Electronic grade water
GB 14193-1993 Rules for filling of liquefied gas cylinders
GB/T 14193-2009 Rules for filling of liquefied gas cylinders
GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals
GB 15258-2009 General rules for preparation of precautionary label for chemicals
GB 16804-1997 Precautionary labels for gas cylinders
GB/T 16804-2011 Precautionary labels for gas cylinders
GB/T 26571-2011 Specification for the shelf life of a specialty gas
GB/T 28726-2012 Gas analysis—Gas chromatograph with helium ionization detector
TSG R0006-2014 Supervision Regulation on Safety Technology for Gas Cylinder
GB/T 14193.1-2025 Rules for the filling of liquefied gas cylinders—Part1:Industrial gas cylinder
GB/T 28726-2025 Gas analysis—Gas chromatograph with helium ionization detector
Related Standards
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced