T/IAWBS 018-2022 Active Group standards

T/IAWBS 018-2022 Testing method for the dislocation density of diamond single crystal polished wafers

Publish Date: 2022-12-15 Implement Date: 2022-12-22 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/IAWBS 018-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Semiconductor materials

Publish Date: 2022-12-15

Implement Date: 2022-12-22

Scope

Scope: This document specifies the test method for dislocation density of diamond single-crystal polishing slices. This document is applicable to the testing of dislocation density of diamond single-crystal polishing slices; Main technical content: Based on the material performance characteristics of diamond single crystals and combined with the current research level of dislocation density detection technologies for other single crystals such as sapphire at home and abroad, this standard stipulates the testing principles, measurement accuracy assurance, and measurement steps for the dislocation density of diamond single-crystal polishing slices