T/CNIA 0141-2022 Active Group standards

T/CNIA 0141-2022 Determination of Metal Impurity Content in Hydrogen Used for Polysilicon Production Using Inductively Coupled Plasma Mass Spectroscopy (ICP-MS)

Publish Date: 2022-02-28 Implement Date: 2022-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CNIA 0141-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Comprehensive Testing of Metal Materials

Publish Date: 2022-02-28

Implement Date: 2022-08-01

Scope

Main technical content: This document specifies a method for determining the content of sodium, magnesium, aluminum, calcium, chromium, manganese, iron, nickel, copper, zinc, arsenic, and titanium in hydrogen used for polysilicon production using an inductively coupled plasma mass spectrometer (ICP-MS)

Development Information

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