YS/T 893-2013 Active Industry standards-Non-ferrous metals

YS/T 893-2013 High-purity sputtering titanium target used in electronic film

YS/T 893-2013 High-purity sputtering titanium target used in electronic film

Publish Date: 2013-10-17 Implement Date: 2014-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 893-2013
Standard Type: Industry standards
Standard Status: Active
is_force_gb: no
CCS Name: \nRare light metals and their alloys
ICS Name: Ti products
Publish Date: 2013-10-17
Implement Date: 2014-03-01
Pages: 8 pages

Scope

This standard specifies the requirements, test methods, inspection rules, and marking, packaging, transportation, storage, and quality certification and contracts (orders) for high-purity titanium sputtering targets used in electronic films.
This standard applies to all types of titanium sputtering targets used in the manufacture of electronic films.

Development Information

Word Count: 14 Thousand words Pages: 8 pages

Referenced Standards

GJB 1580A GB/T 1031-1995 Surface roughness parameters and their values GB/T 1031-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Surface roughness parameters and their values GB/T 4698.7-1996 Sponge titanium, titanium and titanium alloys—Determination of nitrogen content—Distillation—Nessler reagent spectrophotometric method GB/T 4698.7-2011 Methods for chemical analysis of titanium sponge,titanium and titanium alloys—Determination of oxygen and nitrogen content GB/T 4698.14-1996 Sponge titanium, titanium and titanium alloys—Determination of carbon content—Combustion coulometric method GB/T 4698.14-2011 Methods for chemical analysis of titanium sponge,titanium and titanium alloys—Determination of carbon content GB/T 4698.15-1996 Sponge titanium, titanium and titanium alloys—Determination of hydrogen content—Vacuum heating gas chromatographic method GB/T 4698.15-2011 Methods for chemical analysis of titanium sponge,titanium and titanium alloys—Determination of hydrogen content GB/T 6394-2002 Metal-methods for estimating the average grain size GB/T 6394-2017 Determination of estimating the average grain size of metal YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies YS/T 891-2013 Methods for chemical analysis of high purity titanium—Determination of trace impurity element content—Glow discharge mass spectrometry YS/T 892-2013 Methods for chemical analysis of high purity titanium—Determination of trace impurity element content—Inductively coupled plasma mass spectrometry YS/T 891-2024 YS/T 891-2024 Chemical analysis methods for high purity titanium - Determination of trace element content - Glow discharge mass spectrometry YS/T 892-2024 High-Purity Titanium Chemical Analysis Method - Determination of Trace Impurity Element Content - Inductively Coupled Plasma Mass Spectrometry Method

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