GB/T 16598-1996
Replaced
YS/T 893-2013
Active
Industry standards-Non-ferrous metals
YS/T 893-2013 High-purity sputtering titanium target used in electronic film
YS/T 893-2013 High-purity sputtering titanium target used in electronic film
Basic Information
Standard Code:
YS/T 893-2013
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
\nRare light metals and their alloys
ICS Name:
Ti products
Publish Date:
2013-10-17
Implement Date:
2014-03-01
Pages:
8 pages
Scope
This standard specifies the requirements, test methods, inspection rules, and marking, packaging, transportation, storage, and quality certification and contracts (orders) for high-purity titanium sputtering targets used in electronic films.
This standard applies to all types of titanium sputtering targets used in the manufacture of electronic films.
Development Information
Referenced Standards
GJB 1580A
GB/T 1031-1995 Surface roughness parameters and their values
GB/T 1031-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Surface roughness parameters and their values
GB/T 4698.7-1996 Sponge titanium, titanium and titanium alloys—Determination of nitrogen content—Distillation—Nessler reagent spectrophotometric method
GB/T 4698.7-2011 Methods for chemical analysis of titanium sponge,titanium and titanium alloys—Determination of oxygen and nitrogen content
GB/T 4698.14-1996 Sponge titanium, titanium and titanium alloys—Determination of carbon content—Combustion coulometric method
GB/T 4698.14-2011 Methods for chemical analysis of titanium sponge,titanium and titanium alloys—Determination of carbon content
GB/T 4698.15-1996 Sponge titanium, titanium and titanium alloys—Determination of hydrogen content—Vacuum heating gas chromatographic method
GB/T 4698.15-2011 Methods for chemical analysis of titanium sponge,titanium and titanium alloys—Determination of hydrogen content
GB/T 6394-2002 Metal-methods for estimating the average grain size
GB/T 6394-2017 Determination of estimating the average grain size of metal
YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies
YS/T 891-2013 Methods for chemical analysis of high purity titanium—Determination of trace impurity element content—Glow discharge mass spectrometry
YS/T 892-2013 Methods for chemical analysis of high purity titanium—Determination of trace impurity element content—Inductively coupled plasma mass spectrometry
YS/T 891-2024 YS/T 891-2024 Chemical analysis methods for high purity titanium - Determination of trace element content - Glow discharge mass spectrometry
YS/T 892-2024 High-Purity Titanium Chemical Analysis Method - Determination of Trace Impurity Element Content - Inductively Coupled Plasma Mass Spectrometry Method
Related Standards
GB/T 2965-1996
Replaced
GB/T 2965-1996 Titanium and titanium alloy bars
GB/T 2524-2002
Replaced
GB/T 2524-2002 Sponge titanium
YS/T 576-2006
Replaced
YS/T 576-2006 Titanium and titanoum alloy tubes for general industrial liquid
YS/T 577-2006
Replaced
YS/T 577-2006 Titanium and titanium alloy baskets
YS/T 580-2006
Replaced