GB/T 34091-2017 Active National standards

GB/T 34091-2017 Gas for electronic industry—Hexafluoroethane

Publish Date: 2017-07-31 Implement Date: 2017-11-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34091-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Industrial gases

Publish Date: 2017-07-31

Implement Date: 2017-11-01

Pages: 7 pages

Scope

This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation, and safety of hexafluoroethane used in the electronics industry. This standard applies to high-purity hexafluoroethane products obtained by refining and purifying industrial hexafluoroethane. It is mainly used as an etching gas in plasma etching processes in the electronics industry or as a cleaning agent for electronic components. Molecular formula: C2F6. Relative molecular mass: 138.0124 (based on the 2013 International Atomic Mass Table).

Development Information

Word Count: 12 Thousand words Pages: 7 pages

Referenced Standards

危险化学品安全管理条例(2002年版) 特种设备安全监察条例(2009年版) GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB/T 5099-1994 Seamless steel gas cylinders GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders GB/T 5832.1-2003 Determination of moisture in gases—Part 1:Electrolytic method GB/T 5832.1-2016 Gas analysis—Determination of moisture—Part 1:Electrolytic method GB 7144-1999 Colored cylinder mark for gases GB/T 7144-2016 Coloured cylinder mark for gases GB 14193-1993 Rules for filling of liquefied gas cylinders GB/T 14193-2009 Rules for filling of liquefied gas cylinders GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals GB 15258-2009 General rules for preparation of precautionary label for chemicals GB 16804-1997 Precautionary labels for gas cylinders GB/T 16804-2011 Precautionary labels for gas cylinders GB/T 26571-2011 Specification for the shelf life of a specialty gas GB/T 28726-2012 Gas analysis—Gas chromatograph with helium ionization detector TSG R0006-2014 Supervision Regulation on Safety Technology for Gas Cylinder GB/T 14193.1-2025 Rules for the filling of liquefied gas cylinders—Part1:Industrial gas cylinder GB/T 28726-2025 Gas analysis—Gas chromatograph with helium ionization detector

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