GB/T 19921-2005 Replaced National standards

GB/T 19921-2005 Test method of particles on silicon wafer surfaces

Publish Date: 2005-09-19 Implement Date: 2006-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 19921-2005

Standard Type: National standards

Standard Status: Replaced

is_force_gb: no

CCS Name: Analysis methods for semi-metallic and semiconductor materials

ICS Name: Comprehensive Testing of Metal Materials

Publish Date: 2005-09-19

Implement Date: 2006-04-01

Pages: 10 pages

Development Information

Word Count: 16 Thousand words Pages: 10 pages

Superseded by the following standards

GB/T 19921-2018 Test method for particles on polished silicon wafer surfaces

Referenced Standards

ASTM F1620-96 ASTM F 1621-96 SEMI M1-0302

Related Standards

GB/T 14140.1-1993 Replaced

GB/T 14140.1-1993 Silicon slices and wafers—Measuring of diameter—Optical projecting method

Publish Date: 1993-02-06

GB/T 14140.2-1993 Replaced

GB/T 14140.2-1993 Silicon slices and wafers—Measuring of diameter—Micrometer method

Publish Date: 1993-02-06

GB/T 15615-1995 Abolished

GB/T 15615-1995 Test method for measuring flexure strength of silicon slices

Publish Date: 1995-07-12

GB/T 16481-1996 Abolished

GB/T 16481-1996 Standard spectrum tables of microwave plasma torch-atomic emitting spectrum of rare earth

Publish Date: 1996-07-09

GB/T 1550-1997 Replaced

GB/T 1550-1997 Standard methods for measuring conductivity type of extrinsic semiconducting materials

Publish Date: 1997-06-03

GB/T 1553-1997 Replaced

GB/T 1553-1997 Standard test methods for minority carrier lifetime in bulk germanium and silicon by measurement of photoconductivity decay

Publish Date: 1997-06-03