GB/T 14140.1-1993
Replaced
GB/T 19922-2005
Active
National standards
GB/T 19922-2005 Standard test methods for measuring site flatness on silicon wafers by noncontact scanning
GB/T 19922-2005 Standard test methods for measuring site flatness on silicon wafers by noncontact scanning
Basic Information
Standard Code:
GB/T 19922-2005
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Analysis methods for semi-metallic and semiconductor materials
ICS Name:
Comprehensive Testing of Metal Materials
Publish Date:
2005-09-19
Implement Date:
2006-04-01
Pages:
9 pages
Development Information
Referenced Standards
Related Standards
GB/T 14140.2-1993
Replaced
GB/T 14140.2-1993 Silicon slices and wafers—Measuring of diameter—Micrometer method
GB/T 15615-1995
Abolished
GB/T 15615-1995 Test method for measuring flexure strength of silicon slices
GB/T 16481-1996
Abolished
GB/T 16481-1996 Standard spectrum tables of microwave plasma torch-atomic emitting spectrum of rare earth
GB/T 1550-1997
Replaced
GB/T 1550-1997 Standard methods for measuring conductivity type of extrinsic semiconducting materials
GB/T 1553-1997
Replaced