YS/T 985-2014 Active Industry standards-Non-ferrous metals

YS/T 985-2014 Polished reclaimed silicon wafers

Publish Date: 2014-10-14 Implement Date: 2015-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 985-2014

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: Semi-metals and semiconductor materials

ICS Name: Semiconductor materials

Publish Date: 2014-10-14

Implement Date: 2015-04-01

Pages: 12 pages

Scope

This standard specifies the requirements, inspection methods, inspection rules, marking, packaging, transportation, storage, quality certificates, and order forms (or contracts) for silicon polishing recovery wafers.
This standard applies to silicon recovery wafers provided by users or sourced from third parties (mainly including 100 mm, 125 mm, 150 mm, and 200 mm single-sided or double-sided polished silicon wafers, unpolished silicon wafers, or epitaxial silicon wafers) prepared by single-sided polishing. The products are mainly used for monitoring in machinery, furnace processing, particle detection, and lithography. Additionally, users need to pay attention to the thermal history, body contamination, and surface deposits of silicon recovery wafers.