GB/T 11093-1989
Replaced
T/QGCML 497-2022
Abolished
Group standards
T/QGCML 497-2022 Graphical Sapphire Substrate Production Technical Specification
T/QGCML 497-2022 Graphical Sapphire Substrate Production Technical Specification
Price:
$ 20.00
Basic Information
Standard Code:
T/QGCML 497-2022
Standard Type:
Group standards
Standard Status:
Abolished
is_force_gb:
no
CCS Name:
-
ICS Name:
Semiconductor materials
Publish Date:
2022-12-01
Implement Date:
2022-12-16
Scope
Main technical content: This document specifies the terms and definitions of graphitized sapphire substrates, raw materials, environmental protection, personnel and equipment requirements, processes and equipment, production processes, finished product requirements, test methods, inspection rules, marking, packaging, transportation, storage, and quality assurance. This document is applicable to the production technical specifications of graphitized sapphire substrates.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced