GB/T 34893-2017 Active National standards

GB/T 34893-2017 Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer

Publish Date: 2017-11-01 Implement Date: 2018-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34893-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Microcircuit

ICS Name: Integrated circuits, microelectronics

Publish Date: 2017-11-01

Implement Date: 2018-05-01

Pages: 9 pages

Scope

This standard specifies a method for measuring the in-plane length of MEMS microstructures based on optical interference microscopy. This standard is applicable to MEMS microstructures with a surface reflectivity of no less than 4%, an aspect ratio of no less than 1:10, and whose morphology can be acquired using an optical interference microscope.

Development Information

Word Count: 14 Thousand words Pages: 9 pages

Referenced Standards

GB/T 3505-2000 Geometrical product specifications (GPS)—Surface texture:Profile method—Terms, definitions and surface texture parameters GB/T 3505-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Terms,definitions and surface texture parameters GB/T 26111-2010 Micro-electromechanical system technology—Terms GB/T 26111-2023 Micro-electromechanical system technology—Terms GB/T 26113-2010 Micro-electromechanical system technology—General rules for the assessment of micro-geometrical parameters

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