GB/T 11093-1989
Replaced
YS/T 1590-2022
Active
Industry standards-Non-ferrous metals
YS/T 1590-2022 Green factory evaluation requirements for polycrystalline silicon industry
YS/T 1590-2022 Green factory evaluation requirements for polycrystalline silicon industry
Basic Information
Standard Code:
YS/T 1590-2022
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Baseline standards and general methods
ICS Name:
Semiconductor materials
Publish Date:
2022-09-30
Implement Date:
2023-04-01
Scope
This document is applicable to the evaluation of green factories in the polysilicon industry.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced