DZ/T 0101.12-1994
Active
SJ 21259-2018
Active
Industry standards-Electronics
SJ 21259-2018 Technological verification procedures for polishing equipment
SJ 21259-2018 Technological verification procedures for polishing equipment
Price:
$ 30
Basic Information
Standard Code:
SJ 21259-2018
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
2018-01-18
Implement Date:
2018-05-01
Pages:
13 pages
Scope
This standard specifies the general requirements, verification conditions, and verification methods for the process verification of polishing equipment. This standard applies to the verification of the process performance of planar polishing equipment, including mechanical polishing, chemical polishing, and chemical-mechanical polishing.
Development Information
Referenced Standards
GB/T 6618-1995 Test method for thickness and total thickness variation of silicon slices
GB/T 6618-2009 Test method for thickness and total thickness variation of silicon slices
GB/T 6621-1995 Test methods for surface flatness of silicon polished slices
GB/T 6621-2009 Testing methods for surface flatness of silicon slices
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