GB/T 11093-1989
Replaced
GB/T 6618-1995
Replaced
National standards
GB/T 6618-1995 Test method for thickness and total thickness variation of silicon slices
GB/T 6618-1995 Test method for thickness and total thickness variation of silicon slices
Basic Information
Standard Code:
GB/T 6618-1995
Standard Type:
National standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
\nTest methods for the physical properties of metals
ICS Name:
Semiconductor materials
Publish Date:
1995-04-18
Implement Date:
1995-12-01
Pages:
12 pages
Development Information
Replace the following standards
GB 6618-1986
Superseded by the following standards
Referenced Standards
GB/T 12964-2003 Monocrystalline silicon polished wafers
GB/T 12964-2018 Monocrystalline silicon polished wafers
GB/T 12965-1996 Monocrystalline silicon as cut slices and lapped slices
GB/T 12965-2005 Monocrystalline silicon as cut slices and lapped slices
GB/T 12965-2018 Monocrystalline silicon as cut wafers and lapped wafers
Adopt standards
ASTM F533-1990
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced